Patent Assignment
Reel/Frame 056142/0783
Assignment of Assignor's Interest
Recorded: 2021-05-05
Pages: 3
Assignors
WANG, YU-YOUNG
Executed: 2021-04-14
YANG, WEN-CHENG
Executed: 2021-04-16
NI, CHYI-TSONG
Executed: 2021-04-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
NO. 8, LI-HSIN ROAD 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Apparatus and Method for Physical Vapor Deposition