Patent Assignment
Reel/Frame 056143/0380
Assignment of Assignor's Interest
Recorded: 2021-05-05
Pages: 5
Assignor
HATAKEYAMA, JUN
Executed: 2021-04-21
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Positive Resist Composition and Patterning Process