Patent Assignment
Reel/Frame 056182/0047
Assignment of Assignor's Interest
Recorded: 2021-05-10
Pages: 10
Assignors
HASHIMA, HITOSHI
Executed: 2021-04-30
TOCHIHARA, TOHRU
Executed: 2021-05-10
MATSUSHITA, MICHIAKI
Executed: 2021-05-10
KIYAMA, HIDEKAZU
Executed: 2021-04-29
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Apparatus and Substrate Transfer Method