Patent Assignment
Reel/Frame 056184/0035
Assignment of Assignor's Interest
Recorded: 2021-05-10
Pages: 7
Assignors
ITO, MASAYOSHI
Executed: 2021-03-24
MATSUO, HISANORI
Executed: 2021-03-29
KOBATA, ITSUKI
Executed: 2021-03-29
MORIURA, TAKUYA
Executed: 2021-03-29
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Apparatus for Polishing and Method of Polishing