Patent Assignment
Reel/Frame 056191/0298
Assignment of Assignor's Interest
Recorded: 2021-05-10
Pages: 5
Assignors
LIU, CHIH-CHENG
Executed: 2021-04-07
WENG, MING-HUI
Executed: 2021-04-05
LI, JR-HUNG
Executed: 2021-04-11
CHENG, YAHRU
Executed: 2021-04-05
YANG, CHI-MING
Executed: 2021-04-09
LEE, TZE-LIANG
Executed: 2021-04-05
CHANG, CHING-YU
Executed: 2021-04-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Manufacturing a Semiconductor Device and Pattern Formation Method