Patent Assignment
Reel/Frame 056198/0940
Assignment of Assignor's Interest
Recorded: 2021-05-11
Pages: 5
Assignors
MA, WEIMIN
Executed: 2021-05-07
HAN, CHUNYING
Executed: 2021-05-07
LIU, CHENGCHENG
Executed: 2021-05-07
HUANG, SHOUYAN
Executed: 2021-05-07
Assignee
ZHONGKE JINGYUAN ELECTRON LIMITED, BEIJING (CN)
BUILDING 12, #156, 4TH JINGHAI ROAD, BEIJING ECONOMIC, TECHNOLOGICAL DEVELOPMENT DISTRICT, BEIJING, 100176, CHINA
Covered Property
(1)
Overlay Alignment Mark and Method for Measuring Overlay Error