Patent Assignment
Reel/Frame 056200/0600
Assignment of Assignor's Interest
Recorded: 2021-05-11
Pages: 16
Assignor
MATTSON TECHNOLOGY, INC.
Executed: 2021-02-19
Assignees
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD
NO. 8 BUILDING, NO. 28 JINGHAI ER RD, ECONOMIC AND TECHNICAL DEVELOPMENT ZONE, BEJING, 100176, CHINA
Covered Property
(1)
Processing of Workpieces Using Flourocarbon Plasma
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.