Patent Assignment
Reel/Frame 056206/0241
Assignment of Assignor's Interest
Recorded: 2021-05-11
Pages: 4
Assignors
KIM, YUNHO
Executed: 2021-05-03
SHI, YANXIANG
Executed: 2021-04-30
WANG, MINGMEI
Executed: 2021-04-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing System And Method Using Radio Frequency And Microwave Power