Patent Assignment
Reel/Frame 056216/0917
Assignment of Assignor's Interest
Recorded: 2021-05-12
Pages: 3
Assignors
SCHAAFSMA, MARTIJN CORNELIS
Executed: 2019-02-11
AKHSSAY, MHAMED
Executed: 2019-02-11
DOWNES, JAMES ROBERT
Executed: 2019-02-19
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Measurement Apparatus and Method for Predicting Aberrations in a Projection System