Patent Assignment
Reel/Frame 056232/0871
Assignment of Assignor's Interest
Recorded: 2021-05-13
Pages: 7
Assignors
WANG, YI-REN
Executed: 2019-04-08
LIN, HUNG-HUA
Executed: 2019-04-08
HSIEH, YUAN-CHIH
Executed: 2019-04-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Pizoelectric Mems Device with Electrodes Having Low Surface Roughness