Patent Assignment
Reel/Frame 056264/0685
Assignment of Assignor's Interest
Recorded: 2021-05-17
Pages: 3
Assignor
LAUFFER, PETER SEBALD
Executed: 2021-04-21
Assignee
AIXTRON SE
DORNKAULSTRASSE 2, HERZOGENRATH, 52134, GERMANY
Covered Property
(1)
Device and Method for Controlling the Ceiling Temperature of a Cvd Reactor