Patent Assignment
Reel/Frame 056281/0030
Assignment of Assignor's Interest
Recorded: 2021-05-18
Pages: 6
Assignors
NITTALA, KRISHNA
Executed: 2021-02-25
BOBEK, SARAH MICHELLE
Executed: 2021-02-19
LEE, KWANGDUK DOUGLAS
Executed: 2021-02-19
LIMDULPAIBOON, RATSAMEE
Executed: 2021-02-22
KIOUSSIS, DIMITRI
Executed: 2021-02-19
JANAKIRAMAN, KARTHIK
Executed: 2021-02-19
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods, Systems, and Apparatus for Processing Substrates Using One or More Amorphous Carbon Hardmask Layers