Patent Assignment
Reel/Frame 056315/0037
Assignment of Assignor's Interest
Recorded: 2021-05-21
Pages: 5
Assignors
ZI, AN-REN
Executed: 2018-09-11
LIN, CHIN-HSIANG
Executed: 2018-09-11
CHANG, CHING-YU
Executed: 2018-09-11
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Composition and Method of Forming Photoresist Pattern