Patent Assignment
Reel/Frame 056317/0827
Assignment of Assignor's Interest
Recorded: 2021-05-21
Pages: 8
Assignors
KIM, YUNHO
Executed: 2021-05-14
ZHANG, DU
Executed: 2021-05-18
CHANG, SHIHSHENG
Executed: 2021-05-13
WANG, MINGMEI
Executed: 2021-05-15
METZ, ANDREW
Executed: 2021-05-20
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cyclic Plasma Etching Of Carbon-Containing Materials