Patent Assignment
Reel/Frame 056318/0348
Assignment of Assignor's Interest
Recorded: 2021-05-21
Pages: 3
Assignor
MORI, YUKIHIRO
Executed: 2021-05-07
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
High-Throughput, Multi-Chamber Substrate Processing System