Patent Assignment
Reel/Frame 056357/0884
Assignment of Assignor's Interest
Recorded: 2021-05-26
Pages: 8
Assignors
PLATOW, WILHELM
Executed: 2021-05-24
BASSOM, NEIL
Executed: 2021-05-24
SATOH, SHU
Executed: 2021-05-24
SILVERSTEIN, PAUL
Executed: 2021-05-21
FARLEY, MARVIN
Executed: 2021-05-22
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Stepped Indirectly Heated Cathode with Improved Shielding