Patent Assignment
Reel/Frame 056375/0848
Assignment of Assignor's Interest
Recorded: 2021-05-27
Pages: 5
Assignors
GOH, JUNG SUK
Executed: 2021-04-26
CHUNG, YOUNG DAE
Executed: 2021-04-26
JEONG, JI HOON
Executed: 2021-04-26
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Control Using a Measured Size Distribution of by-Product Particles