Patent Assignment
Reel/Frame 056384/0115
Assignment of Assignor's Interest
Recorded: 2021-05-28
Pages: 3
Assignors
CHEN, OTTO
Executed: 2021-05-19
TSENG, YING-YEN
Executed: 2021-05-25
KU, WEN-YU
Executed: 2021-05-19
CHEN, CHIA-CHIH
Executed: 2021-05-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Method for Managing Temperature in Semiconductor Fabrication Facility