Patent Assignment
Reel/Frame 056384/0297
Assignment of Assignor's Interest
Recorded: 2021-05-28
Pages: 4
Assignors
LIN, WEN-KAI
Executed: 2021-05-07
CHANG, CHE-HAO
Executed: 2021-05-28
CHUI, CHI ON
Executed: 2021-05-04
LU, YUNG-CHENG
Executed: 2021-05-04
CHEN, SZU-YING
Executed: 2021-05-04
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Reducing K Values of Dielectric Films Through Anneal