Patent Assignment
Reel/Frame 056402/0209
Assignment of Assignor's Interest
Recorded: 2021-06-01
Pages: 4
Assignor
FELER, YOEL
Executed: 2021-05-20
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Metrology Methods and Optical Schemes for Measurement of Misregistration by Using Hatched Target Designs