Patent Assignment
Reel/Frame 056403/0352
Assignment of Assignor's Interest
Recorded: 2021-06-01
Pages: 7
Assignors
LEE, JANG-YEOB
Executed: 2021-05-13
KIM, SUNGYEOL
Executed: 2021-05-21
YUN, JINYEONG
Executed: 2021-05-13
KIM, MINSUNG
Executed: 2021-05-13
YOO, HOSUN
Executed: 2021-05-21
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method