Patent Assignment
Reel/Frame 056413/0990
Assignment of Assignor's Interest
Recorded: 2021-06-02
Pages: 2
Assignee
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE, FORT COLLINS, COLORADO, 80525
Covered Property
(1)
Wafer Chucking Monitor Using High Frequency Injected Ac Signal