Patent Assignment
Reel/Frame 056444/0712
Assignment of Assignor's Interest
Recorded: 2021-06-04
Pages: 4
Assignors
HAN, YUN
Executed: 2021-06-01
PHILIPPI, CAITLIN
Executed: 2021-06-02
METZ, ANDREW
Executed: 2021-06-01
RANJAN, ALOK
Executed: 2021-06-01
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cyclic Plasma Processing