Patent Assignment
Reel/Frame 056465/0415
Assignment of Assignor's Interest
Recorded: 2021-06-08
Pages: 5
Assignor
SAITO, HIDETO
Executed: 2021-06-03
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, and Temperature Control Method