Patent Assignment
Reel/Frame 056490/0300
Assignment of Assignor's Interest
Recorded: 2021-06-09
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus