Patent Assignment
Reel/Frame 056501/0830
Assignment of Assignor's Interest
Recorded: 2021-06-10
Pages: 18
Assignors
KAWAKAMI, SATORU
Executed: 2021-05-18
YAMAMOTO, HIROYUKI
Executed: 2021-05-20
IKEDA, TARO
Executed: 2021-05-19
HIRAYAMA, MASAKI
Executed: 2021-05-19
Assignees
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
TOHOKU UNIVERSITY
2-1-1, KATAHIRA, AOBA-KU, SENDAI-SHI, MIYAGI, 9808577, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method