Patent Assignment
Reel/Frame 056528/0528
Assignment of Assignor's Interest
Recorded: 2021-06-14
Pages: 11
Assignors
MORI, HIROTOSHI
Executed: 2021-06-04
TANOUE, HAYATO
Executed: 2021-06-04
KAWAGUCHI, YOSHIHIRO
Executed: 2021-06-08
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method