Patent Assignment
Reel/Frame 056534/0209
Assignment of Assignor's Interest
Recorded: 2021-06-14
Pages: 10
Assignors
WANG, CHEN-HAN
Executed: 2020-05-06
LIN, KENG-CHU
Executed: 2020-05-06
LIANG, SHUEN-SHIN
Executed: 2021-04-13
UENO, TETSUJI
Executed: 2021-04-11
CHEN, TING-TING
Executed: 2020-08-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Methods for Manufacturing Semiconductor Devices with Tunable Low-k Inner Air Spacers