Patent Assignment
Reel/Frame 056541/0793
Assignment of Assignor's Interest
Recorded: 2021-06-15
Pages: 4
Assignor
RICE, MICHAEL R.
Executed: 2018-05-31
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Substrate Processing Apparatus and Methods with Factory Interface Chamber Filter Purge