Patent Assignment
Reel/Frame 056551/0164
Assignment of Assignor's Interest
Recorded: 2021-06-15
Pages: 5
Assignors
SUZUKI, TSUYOSHI
Executed: 2021-03-03
NAKADA, KATSUYUKI
Executed: 2021-02-26
SASAKI, TOMOYUKI
Executed: 2021-02-25
Assignee
TDK CORPORATION
2-5-1, NIHONBASHI, CHUO-KU, TOKYO, 103-6128, JAPAN
Covered Property
(1)
Film Deposition System, Factory System, and Method of Depositing Film on Wafer