Patent Assignment
Reel/Frame 056561/0583
Assignment of Assignor's Interest
Recorded: 2021-06-16
Pages: 5
Assignors
HATAKEYAMA, JUN
Executed: 2021-06-04
NAGATA, TAKESHI
Executed: 2021-06-04
LIN, CHUANWEN
Executed: 2021-06-06
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Chemically Amplified Resist Composition and Patterning Process