Patent Assignment
Reel/Frame 056572/0316
Assignment of Assignor's Interest
Recorded: 2021-06-17
Pages: 7
Assignor
KOBAYASHI, MASAHITO
Executed: 2021-06-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Inspection Apparatus and Inspection Method