Patent Assignment
Reel/Frame 056603/0156
Assignment of Assignor's Interest
Recorded: 2021-06-21
Pages: 3
Assignor
RAFAC, ROBERT JAY
Executed: 2019-02-05
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Determining Moving Properties of a Target in an Extreme Ultraviolet Light Source