Patent Assignment
Reel/Frame 056617/0646
Assignment of Assignor's Interest
Recorded: 2021-06-17
Pages: 17
Assignors
SHINAGAWA, JUN
Executed: 2021-05-27
KITAO, TOSHIHIRO
Executed: 2021-05-27
SUZUKI, ATSUSHI
Executed: 2021-05-27
WOOLEY, MEGAN
Executed: 2021-05-28
RANJAN, ALOK
Executed: 2021-06-10
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Virtual Metrology Enhanced Plasma Process Optimization Method