Patent Assignment
Reel/Frame 056619/0140
Assignment of Assignor's Interest
Recorded: 2021-06-22
Pages: 11
Assignors
KOSAI, KAZUKI
Executed: 2021-06-10
TAKAMATSU, YUSUKE
Executed: 2021-06-15
INOUE, TAISEI
Executed: 2021-06-10
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus and Liquid Processing Method