Patent Assignment
Reel/Frame 056645/0960
Confirmatory License
Recorded: 2021-06-22
Pages: 2
Assignor
BROWN UNIVERSITY
Executed: 2011-01-06
Assignee
UNITED STATES DEPARTMENT OF ENERGY
1000 INDEPENDENCE AVE. S.W., WASHINGTON, DISTRICT OF COLUMBIA, 20585
Covered Property
(1)
Optical Method and System for the Characterization of Laterally-Patterned Samples in Integrated Circuits