Patent Assignment
Reel/Frame 056648/0316
Assignment of Assignor's Interest
Recorded: 2021-06-24
Pages: 4
Assignors
ZI, AN-REN
Executed: 2021-05-06
HO, CHUN-CHIH
Executed: 2021-05-05
CHENG, YAHRU
Executed: 2021-06-02
CHANG, CHING-YU
Executed: 2021-05-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Manufacturing Semiconductor Devices and Pattern Formation Method