Patent Assignment
Reel/Frame 056681/0575
Assignment of Assignor's Interest
Recorded: 2021-06-28
Pages: 6
Assignors
ZHANG, QUAN
Executed: 2019-01-09
CHO, YONG-JU
Executed: 2019-01-09
ZHU, ZHANGNAN
Executed: 2019-01-09
CHEN, BEEN-DER
Executed: 2019-01-09
HUANG, BOYANG
Executed: 2019-09-29
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Generating Patterning Device Pattern at Patch Boundary