Patent Assignment
Reel/Frame 056689/0909
Assignment of Assignor's Interest
Recorded: 2021-06-28
Pages: 10
Assignors
KIKKAWA, YUKI
Executed: 2021-04-22
SATO, TOMOAKI
Executed: 2021-04-22
SHIMODA, TAKAFUMI
Executed: 2021-05-07
NEGISHI, TAKAYUKI
Executed: 2021-05-12
Assignee
TOKUYAMA CORPORATION
1-1, MIKAGE-CHO, SHUNAN-SHI, YAMAGUCHI, 745-8648, JAPAN
Covered Property
(1)
Onium Salt-Containing Treatment Liquid for Semiconductor Wafers