Patent Assignment
Reel/Frame 056715/0429
Assignment of Assignor's Interest
Recorded: 2021-06-30
Pages: 4
Assignors
SASAKI, YUTA
Executed: 2019-06-03
OTSUJI, MASAYUKI
Executed: 2019-06-03
FUJIWARA, NAOZUMI
Executed: 2019-06-05
KATO, MASAHIKO
Executed: 2019-06-03
YAMAGUCHI, YU
Executed: 2019-06-03
TAKAHASHI, HIROAKI
Executed: 2019-06-03
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Apparatus and Pre-Drying Processing Liquid