Assignment of Assignor's Interest

Recorded: 2021-07-05 Pages: 4

Assignors

BARRY, SEAN T.

Executed: 2007-02-16

WASSLEN, YAMILE A.M.

Executed: 2007-02-16

RAHTU, ANTTI H.

Executed: 2007-01-23

Assignee

ASM MICROCHEMISTRY OY

VAINE AUERIN KATU 12A, HELSINKI, 00560, FINLAND

Covered Properties (6)

Ald of Zirconium-Containing Films Using Cyclopentadienyl Compounds

Patent: 9,273,391 →

Application: 14/311,154 →

Publication: US 2015/0017348

Ald of Metal-Containing Films Using Cyclopentadienyl Compounds

Patent: 9,677,175 →

Application: 15/006,532 →

Publication: US 2016/0230277

Ald of Metal-Containing Films Using Cyclopentadienyl Compounds

Patent: 9,670,582 →

Application: 15/363,998 →

Publication: US 2017/0081762

Ald of Hafnium-Containing Films Using Cyclopentadienyl Compounds

Patent: 10,294,563 →

Application: 15/602,514 →

Publication: US 2017/0362709

Ald of Metal-Containing Films Using Cyclopentadienyl Compounds

Patent: 9,850,575 →

Application: 15/700,494 →

Publication: US 2017/0369997

Ald of Metal-Containing Films Using Cyclopentadienyl Compounds

Patent: 11,155,919 →

Application: 16/411,964 →

Publication: US 2020/0024738

Related Assignments (1)

Other recorded transfers of the patents in this record — the chain of ownership.