Patent Assignment
Reel/Frame 056771/0331
Confirmatory License
Recorded: 2021-06-29
Pages: 2
Assignor
BROWN UNIVERSITY
Executed: 2014-02-10
Assignee
UNITED STATES DEPARTMENT OF ENERGY
1000 INDEPENDENCE AVE. S.W., WASHINGTON, DISTRICT OF COLUMBIA, 20585
Covered Property
(1)
Optical Method for the Characterization of Laterally Patterned Samples in Integrated Circuits