Patent Assignment
Reel/Frame 056801/0328
Assignment of Assignor's Interest
Recorded: 2021-07-09
Pages: 7
Assignors
OH, JONGKEUN
Executed: 2021-03-11
PARK, SANGUK
Executed: 2021-03-12
JO, GYEONGCHEON
Executed: 2021-03-12
PARK, JONGJU
Executed: 2021-03-12
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Manufacturing Extreme Ultraviolet (Euv) Photomask and Method and Apparatus for Correcting Euv Photomask