Patent Assignment
Reel/Frame 056829/0297
Assignment of Assignor's Interest
Recorded: 2021-07-12
Pages: 8
Assignors
COOK, BENJAMIN JOHN
Executed: 2021-05-12
WINKLER, DIETER
Executed: 2021-06-24
THOMANN, MARKUS
Executed: 2021-05-12
KEMEN, THOMAS
Executed: 2021-04-22
BARDAY, ROMAN
Executed: 2021-04-29
Assignee
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH
AMMERTHALSTR. 20, HEIMSTETTEN, D-85551, GERMANY
Covered Property
(1)
Charged Particle Beam Apparatus, Multi-Beamlet Assembly, and Method of Inspecting a Specimen