Patent Assignment
Reel/Frame 056864/0899
Assignment of Assignor's Interest
Recorded: 2021-07-15
Pages: 4
Assignors
HATAKEYAMA, JUN
Executed: 2021-06-07
ISHIBASHI, NAOKI
Executed: 2021-06-07
SAGEHASHI, MASAYOSHI
Executed: 2021-06-07
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Positive Resist Material and Patterning Process