Patent Assignment
Reel/Frame 056918/0175
Assignment of Assignor's Interest
Recorded: 2021-07-20
Pages: 3
Assignors
CUI, LINYING
Executed: 2021-07-15
ROGERS, JAMES
Executed: 2021-07-16
DORF, LEONID
Executed: 2021-07-16
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Automatic Electrostatic Chuck Bias Compensation During Plasma Processing