Patent Assignment
Reel/Frame 056934/0515
Assignment of Assignor's Interest
Recorded: 2021-07-21
Pages: 3
Assignor
CHEN, CHIEN-CHIH
Executed: 2021-05-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Metallic Photoresist Patterning and Defect Improvement