Patent Assignment
Reel/Frame 056965/0775
Assignment of Assignor's Interest
Recorded: 2021-07-23
Pages: 3
Assignors
CHANG, QING
Executed: 2021-07-16
LI, BING
Executed: 2021-07-16
BIAN, GUODONG
Executed: 2021-07-16
Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
NO.8 WENCHANG AVENUE,, BEIJING ECONOMIC- TECHNOLOGICAL DEVELOPMENT AREA, BEIJING, 100176, CHINA
Covered Property
(1)
Shield Cooling Assembly, Reaction Chamber and Semiconductor Processing Apparatus