Patent Assignment
Reel/Frame 056979/0030
Assignment of Assignor's Interest
Recorded: 2021-07-26
Pages: 4
Assignee
SHANGHAI HUALI MICROELECTRONICS CORPORATION
NO. 6 LIANGTENG ROAD, PUDONG NEW AREA, SHANGHAI, 201314, CHINA
Covered Property
(1)
Method for Manufacturing Deep Trench Isolation Grid Structure