Patent Assignment
Reel/Frame 057004/0032
Assignment of Assignor's Interest
Recorded: 2021-07-28
Pages: 7
Assignors
VERGÖHL, MICHAEL
Executed: 2021-02-05
PFLUG, ANDREAS
Executed: 2021-03-05
BRUNS, STEFAN
Executed: 2021-01-23
ZICKENROTT, TOBIAS
Executed: 2021-02-26
Assignee
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
HANSASTRASSE 27C, MÜNCHEN, 80686, GERMANY
Covered Property
(1)
Method for Producing Layers with Improved Uniformity in Coating Systems with Horizontally Rotating Substrate Guiding